Tegal is a Registered Trademark of Tegal Corp.;Lam Rainbow and AutoEtch are Registered Trademark of Lam Research;Gasoncis,Branson is a Registered Trademark of Novellus Corp.;Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.;Tencor/ KLA-Tencor M-Gage 300 is a Registered Trademark of KLA-Tencor.EG 1034,EG 2001 are Registered Trademark of Electroglas.HP 4062UX,HP 4145A/B are Registered Trademark of Agilent.STS is Registered Trademark of STS.Perkin-Elmer PE 2400,4400,4410,4450,4480 is the registered Trademark of Perkin Elmer.

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