Refurbished Tencor/KLA-Tencor M-Gage 300 without printer.

A Cold Field Emission Gun Scanning Electron Microscope (FEGSEM) of "below-the-lens" design capable of (manufacturer's claims) 1.5 nm resolution at 15 kV, 12 mm W.D.; and 2.5 nm resolution at 1 k, 2.5 mm W.D.  Magnification ranges from 30X to 500,000X.

- Model: S-4500 SEM
- Field Emission Scanning Electron Microscope (FE-SEM)

- Manufacturer: Hitachi
- Model: S8840
- Wafer Size: 200mm
- Hitachi S8840 CD SEM Mainframe

Model: S-8820 or S-8620

·         Vintage: 1996

·         Wafer Size: 150 mm

·         Throughput: 20 wafers per hour 5 pt meas. per wafer continuous

The LEO 982 Field emission scanning electron microscope (FE-SEM, Carl Zeiss SMT Inc. One Corporation Way Peabody, MA 01960) provides a means to achieve ultra high resolution images in the secondary emissive mode.

6 inch full wafer system for in-process inspection and metrology of photoresist, e-beam resist, and nanolithographic structures: Semi-clean contamination level, No Au or Nobel metals allowed. Field emission gun with resolution to ~35 angstoms typical. On-board CD measurement and metrology functions. EDX Noran Instruments X-Ray Microanalysis system is controlled by a high-performance workstation with easy-to-use window manager

The Micrion 9500 is a highly sophisticated Focused Ion Beam System and is capable of performing very delicate microsurgery and cross-sectioning.  

Tencor Thin Film Monitor TF-1,Price:$4,500.00,AS IS,WHERE IS,Advanced Payment.