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Products

4  Rapid Thermal Process
 
·LEDs Production RTA RTP-AW810
·Refurbished AG Heatpulse 210
·Refurbished AG Heatpulse 410
·Refurbished AG Heatpulse 610
·Refurbished AG Heatpulse 21XX
·New AccuThermo AW 810M
·New AccuThermo AW 610
·New AccuThermo AW 410
4  Plasma Asher Stripper Descum
 
·Refurbished Matrix 205
·Refurbished Gasonics Aura 3010
·Refurbished Branson IPC 3000
·Refurbished Matrix 10
·Refurbished Gasonics L3510
·Refurbished GaSonics Aura 2000LL Loadlock Asher
·Branson IPC L3200-Long time Plasma Asher Process
·Refurbished Gasonics Aura 1000
·Refurbished Matrix 105
4  Plasma Etch
 
·Lam Autoetcher 590
·Lam AutoEtch Lam 490
·Refurbished Tegal 901e
·Refurbished Matrix 303
·Refurbished Matrix 403
·Refurbished Gasonics AE 2001
·Lam Rainbow 4520 Oxide Etch
·Lam Rainbow 4428 for Plasma Etch
·Lam Rainbow 4420 Plasma Etch
4  Reactive ion etching (RIE)
 
·Plasma Therm VII 70 Series
·Refurbished STS 320 RIE
4  PECVD
 
·Refurbished STS 310 PECVD
4  Inductively coupled plasma (ICP)
 
·Refurbished STS 320 ICP
4  Metrology & Inspection
 
·Hitachi S8840 Scanning Electron Microscope
·XFlash® QUAD 5040 Detector
·XFlash® 5030 Detector
·XFlash® 5010 Detector
·Energy Dispersive X- Ray Spectrometer QUANTAX 200
·LEO FE-SEM model 982
·Micrion FIB model M9500
·Hitachi FE-SEM model S-4160
·Hitachi FE-SEM model S-4700
·Hitachi S-4500 SEM Cold Field Emission SEM System
·Hitachi S-8820 CD SEM
·Hitachi S-9300 CD SEM_SDI
·Hitachi S-4800 SEM Cold Field Emission SEM System
4  Misc.
4  Backside Equipment
4  Lab Equipment
 
·Muffle Furnaces (400-1800C)
·Tube Furnaces (1-5 Zone)
·Hi-Pressure Furnace
·RTP Furnaces
·Dental Sintering Furnaces
·Induction heaters&CZ grower
·Lab Ovens / Hot Plates
·Melting Furnaces
·Cutting / Dicing Saws
·Polishing Machines
·Desktop Machine-shop
·Glove Box
·Film Coaters
·Lab Press & Rollers
·Laboratory Mill / Mixer
·Battery / Capacitor Analyzers
·Desk-Top X-Ray Instruments
·Digital Microscopes
·DI Water / Ultrasonics
·UV Equipment & Adhesives
·Lab Ware / Accessory
·Round Wafer Carriers
·Sticky & Film Boxes
·IC Tray & Plastic Boxes
·Vacuum Pen&Tweezers
4  Electrical Test and PCM Software
 
·Electronic Tester List
·Temptronic TP03500
·HP 4142B
·Refurbished HP 4145B
·Refurbished HP 4062UX
·Refurbished HP 4155
4  Sputtering and Evaporator System
 
·Upgrade MRC903A Sputter System
4  Lithography & Photoresist
 
·IOS.Cube 6 | Series
·IOS.Cube 5 | Series
·IOS.Cube 3 | Series
·IOS.Cube 2 | Series
·IOS.Cube 1 | Series
4  Wet Processing
 
·SV-702 Spin Rinse & Dryer (SRD) system
·SV-802 Spin Rinse & Dryer (SRD) system
·ASD-SH-802 Horizontal Spin Dry-In
4  Wafer Probers
 
·Refurbished EG 4085X
·Refurbished EG 1034
·Refurbished EG 2001
·Refurbished MP 2020
·Refurbished EG 2010
4  Chiller
4  Pump
4  RF Power
4  Oven
4  Gas Cabint
4  Inventory on Sale
4  Gallium Nitride Material
 
·free-standing GaN substrate
·GaN Templates
4  Bulk Equipment on sale
 

Inductively coupled plasma (ICP)

An inductively coupled plasma (ICP) is a type of plasma source in which the energy is supplied by electrical currents which are produced by electromagnetic induction, that is, by time-varying magnetic fields.
There are two types of ICP geometries: planar and cylindrical. In planar geometry, the electrode is a coil of flat metal wound like a spiral. In cylindrical geometry, it is like a helical spring.
When a time-varying electric current is passed through the coil, it creates a time varying magnetic field around it, which in turn induces azimuthal electric currents in the rarefied gas, leading to break down and formation of a plasma.
ICP discharges are of relatively high electron density, on the order of 1015 cm-3.As a result, ICP discharges have wide applications where a high density plasma is necessary.
Another benefit of ICP discharges is that they are relatively free of contamination because the electrodes are completely outside the reaction chamber. In a capacitively coupled plasma (CCP), in contrast, the electrodes are placed inside the reactor and are thus exposed to the plasma and subsequent reactive chemical species.

Allwin21 Corp can provide the following refurbished  ICP (inductively coupled plasma) equipment.

  • STS 320 ICP
  • Plasma Therm 700 ICP
  • Plasma Therm 790 ICP

Allwin21 Corp. can also provide  Allwin21 Corp proprietary AW Control Software and Superior Temperature Control Technology  to upgrade the refurbished equipment which provides the following significant advantages

  • Integrated process control system
  • Real time graphics display
  • Real time process data acquisition, display, and analysis
  • Programmed comprehensive calibration and diagnostic functions
  • Better performance and maintenance than the original systems
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Allwin21 Corp. Phone:001-408-988-5188 Fax:001-408-9047168 3251 Leonard Court Santa Clara,CA 95054 e-mail:sales@allwin21.com
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