SVG Develop 8126/8136,Used,good condition,complete   Vintage:1999    SN:99-05295

DAINIPPON 60A coater / developer with 10 low temp heaters and 2 high temp heaters. Complete with all accessories, crated, was working when de-isnstalled, can inspect, 6",Manufacture:Dainippon Screen Mfg. Co.,Ltd.

- HTG Inc. Crosslink 1000 DUV Photoresist Stabilizer
- 220-260nm Bandwidth
- Vintage 1985
- Timed UV lamp exposure
- Up to 8" wafers
- Auto-stage loading

Automatic Solutions:

• 6" to 8"
• Up to 4 cassette stations
• 6 process module

 Available Process Modules:

• Spin Coating
• Spray Coating
• Puddle Development
• Spray Development
• Megasonic Development
• Megasonic Cleaning
• Hot and Cool Plate Stacks

(W) 1740mm x (D) 2330mm x (H) 2000mm

 All IOS.Cube Series:

Automatic Solutions:

• 2" to 8"
• 2 cassettes, 50 wafer
• 5 process modules

• Spin Coating
• Spray Coating
• Puddle Development
• Spray Development
• Megasonic Development
• Megasonic Cleaning
• Hot and Cool Plate Stacks

(W) 1354mm x (D) 1345mm x (H) 2000mm

 All IOS.Cube Series:

Automatic Solutions:

• 2" to 8"
• 2 cassettes, 50 wafer
• 3 process modules

 Available Process Modules:

• Spin Coating
• Spray Coating
• Puddle Development
• Spray Development
• Megasonic Development
• Megasonic Cleaning
• Hot and Cool Plate Stacks

Semi-Automatic Solutions:

• 2" to 8"
• Semi-Automatic Loading
• 1 Process Module
• 1 Temperature Plate

 Available Process Modules:

• Spin Coating
• Spray Coating
• Puddle Development
• Spray Development
• Megasonic Development
• Megasonic Cleaning
• Hot Plate, prog. or fixed Proximity 

 All IOS.Cube Series:

Manual Solutions:

• 2" to 8"
• Manual Loading
• 1 process Module

 Available Process Modules:

• Spin Coating
• Spray Coating
• Puddle Development
• Spray Development
• Megasonic Development
• Megasonic Cleaning
• Hot Plate, prog. or fixed Proximity

  All IOS.Cube Series: