AW PCM System is designed for semiconductor fab or lab to automatically do:
* PCM (process control module) testing. (PCM TEST SELECT)
* 100% IC die on wafer probing. (IC TEST SELECT)
* Inline instrument testing. (INLINE TEST SELECT)
For PCM testing, there are DC, RF, LCR, C-V (n-d calculated) testing. AW PCM can
control auto prober like EG2001, EG1034 etc, and characteristic parameter tester like
HP4142 (DC), HP4145A (DC), HP4145B (DC), HP4141 (DC), HP4062 (DC with switch
matrix, LCR meter), HP4275A (LCR and C-V), HP4280A (C-V), HP4084A (LCR and C-V),
HP8772C (RF, Microwave), HP4085M switch matrix, Keithley S280, S350 etc.
For IC 100% die on wafer probing, AW PCM can control auto prober like EG2001,
EG1034 etc, and characteristic parameter tester like HP4142, HP4145B, HP4141,
HP4062, S350 and HP4085 switch matrix.
For inline instrument testing like metrology tools: m-gage or Sonagage, alpha-step,
Rudolph elepisometer, Nanospec AFT, wafer thickness meter etc.
It can save auto alignment info for each mask .
The testing data will be automatically real time sent to the server. Some data can be
transferred to text file or excel file.
For PCM MAP TEST, there are 3 setups for auto map probing:
* Test ID (Manual Test) Setup,
* Map ID setup, and
* Auto ID setup.

 

Download AW PCM SYSTEM Technical Documents

Download AW PCM SYSTEM Technical Documents-Chinese