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Manufacturer:STS (Surface Tech Sys)

Condition:Used (Refurbished and warranty is available). Contact Us for more information.

S/N: 03843    05743

STS MultiplexInductively-Coupled Plasma (ICP) Advanced Silicon Etch (ASE) System which meets OEM SPEC.

Ø       S/N:03843

Ø       Configuration: ASE system, 4 inch

Ø       Clamp-chuck

Ø       Loadlock Capability:3,4,5,6,8 inch

Ø       LEYBOLD 1000 turbo pumps

Ø       Remote Gas control Gas Box with 4 gas line configuration

-SF6

-C4F8

-O2

-Ar

Ø       Dry pumps models: QDP80 for process chamber

Ø       Edwards 40 Vacuum Pump for loadlock

Ø       Helium Back side cooling

Ø       Generators : ENI ACG3  for Bias; ACG10 for Coils; VL400 Phase Shift Controller

Ø       STS AC Box

Ø       STS Purge Panel Assembly

Ø       Chiller: Neslab CFT-75

Allwin21 can provide Allwin21 own New Software with new control boards to upgrade the original ICP system.

STS MultiplexInductively-Coupled Plasma (ICP) Advanced Silicon Etch (ASE) System which meets OEM SPEC.

Ø       S/N:05743

Ø       Configuration: ASE system, 6 inch

Ø       E-chuck

Ø       Loadlock Capability:3,4,5,6,8 inch

Ø       LEYBOLD 1000 turbo pumps

Ø       Remote Gas control Gas Box with 5 gas line configuration

-SF6

-C4F8

-C4F8

-O2

-Ar

Ø       Dry pumps models: QDP80 for process chamber

Ø       Edwards 40 Vacuum Pump for loadlock

Ø       Helium Back side cooling

Ø       Generators : ENI ACG3  for Bias; ACG10 for Coils; VL400 Phase Shift Controller

Ø       STS AC Box

Ø       STS Purge Panel Assembly

Ø       Chiller: Neslab CFT-75

Allwin21 can provide Allwin21 own New Software with new control boards to upgrade the original ICP system.