Original Equipment Manufacturer : STS (Surface Tech Sys)
Model: STS Multiplex single wafer manual load lock ASE ICP Etching
Typical Application: Si ICP Etch
Condition: Fully refurbished and upgraded by Allwin21 Corp with Allwin21 Own Software.
1. New PC controller with Allwin21 Software with GUI interface
· Advanced EOP function with SLOPE
· Real-Time process data acquisition
· Real-Time graphics
· Process Data Analysis
· Process Data and Recipe storage on a hard drive.
· Lowest cost of upgrade solution
2. New AW Main PCB
3. Fully refurbished system which looks like new
4. Lowest ownership cost.
1. Wafer Material: Si
2. Wafer Size: 6 inch
3. Wafer Thickness: 0.2~1.0 mm
4. New EOP function
5. Load lock
7. New Allwin21 Main PCB
8. New Allwin21 Software
9. New PC controller
10. 17" Monitor
11. New Mouse
12. New cables for controller
14. Loadlock Capability:3,4,5,6,8 inch
15. LEYBOLD 1000 turbo pumps
16. Remote Gas control Gas Box with 5 gas line configuration
17. Dry pumps models: QDP80 for process chamber
18. Edwards 40 Vacuum Pump for loadlock
19. Helium Back side cooling
20. Generators : ENI ACG3 for Bias; ACG10 for Coils; VL400 Phase Shift Controller
21. STS AC Box
22. STS Purge Panel Assembly
23. Chiller: Neslab CFT-75
Please help fill in the Customer Survey Form for right configuration for your preferences and needs.
We believe that the suitable is the best.