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KLATencor M-Gage 300 Non-Contact Wafer Monitor for Sheet resistance.
We also provide our new Non-Contact Wafer Monitor for Sheet resistance with innovative thinking which has gone into the improved design and manufacture systems. The rebuilt M-Gage is Allwin21’s own tested and proven improved version and is not functionally equivalent clones.
· Can accommodate up to 6" or 8".
· Measurement range: 1m ohm/square to 2,000 m ohm/square.
· 115v, 60 Hz
The new Non-Contact Wafer Monitor for Sheet resistance configures with AW software package and touch screen panel computer with 12” monitor. The new system can save the data with list and the map in the computer one wafer by one wafer.
The new system removes the digital data converter. Operator can dial the resistivity in the test set up recipe, run different recipe for Al, ti, Tin.