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Manufacturer:Hitachi

Condition:Used,Complete,we sell it at AS IS(Refurbished and Installation are optional)

Price:Best Offer

Amount: 4 sets

Description(Only for reference):

Serial Number: 9106-08
Mfg. Date: Jan-98
? Currently Configured for 200mm Wafer Sizes
? MFG Date: Jan 1998
? Install Type: Stand-Alone
? Mini-Environment
? Cassette Interface (Loader Unit):
o (2) Asyst Integrated SMIF
o MECS Robot/Cntrl
o Lybold Turbo /Cntrl
? Stage & Inspection Unit
o X, Y Travel Range: 0 ¨C 200mm
? Control Unit
o System Software:
 HOST: : v9.23
 SEM: 09.23L
 IPS: 09.02
 HV: 03.01
 Stage: 03.03
 Evac: 01.05
 WT: 1.01
o Support Option(s):
 Low Vacc
 Defect Inspection
 SECE
 Multi-point measurement
 Edge Roughness
 Hole measurement
 Reduced Scan
 Defect Type ¨C KLA
 Image database
 Auto-Vid
 Ip Read
 SMIF
o HV Unit:
 TIP SN: H-13786
 TIP adjustment: 1700k = 2.30A
 HV Timer: 9693 /hr
 IF Setting: 2.28A