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Manufacturer:Hitachi

Condition:Used,we sell it at AS IS(Refurbished and Installation are optional)

Price:Best Offer

Amount: 6 sets (SN 8361-05;SN 8344-06;SN 8358-04;SN 8347-01;SN 8344-05;SN 8343-06)

Description(Only for reference):

* Currently Configured for 200mm Wafer Sizes
* MFG Date: Nov 1996~1997
* Cassette Interface:
(2) Asyst Integrated SMIF
* System Software ver.: 9.15 or 9.25
* Measurement Method: Cursor and Line Profile Measurement
* Measuring Range: 0.1 to 10um (CD Value Guarantee Range 0.3 to 2.5 um)
* Measuring Repeatability: +/-1% or 5 nm (3 sigma), whichever is greater
*Throughput: 20 WPH in Continuous Measurement (5 Point Measurement)
* SEM Image Resolution: 5nm (50 A) , Accelerating Voltage 0.8 kV, TV Integral Image
* Magnification: ~110X (Optical Microscope Image), 1,000 to 150,000X (SEM Image)
? Measuring Mode: Auto Measurement Through Auto Addressing & Image
Recognition/Manual Measurement
? Specimen Stage
X, Y; 0 to 200mm
Stepping Motor Drive
Computer Controlled
? Automatic Evacuation & Wafer Chucking from Load Chamber to Specimen Stage
? Chamber-to-Chamber Auto Loader
Random Access for 2 Cassettes
Robot: MECS UTC 820Z
? Electron Optical System
Accelerating Voltage: 700 to 1300V in 10V Increments
Lens System: Electromagnetic Condenser Lens System, FCM Objective Lens
? Control Unit
? Power Unit
? High Voltage Controller Hours: 9766
* Isolation Transformer
*Vacuum Isolation Block & Hoses
* Optical Drive Present
* Thermal Printer Present ? SECS / GEM Interface
? Power Requirements: 100VAC, 1 Phase, 50A, 50/60 Hz