AllWin21 Corp.

· Self contained microprocessor controlled single wafer in line Photoresist stripper/Asher. Photoresist removal system that reduces carbon chain polymer resist in non-damaging environment. Incorporates closed control loop of vital process parameter and eliminates device damage due to thermal and electrical causes.

FEATURES ( Video )

· Maintains independent closed loop control of process parameter (pressure, RF power, temperature, gas flow and substrate position) thus, tighter process parameter controls and resulting to more optimized process.

· Pick and place cassette to cassette wafer transport system allows individual or batch/lot wafer selections

· Modular configuration allows for significant reduction in maintenance/repair time which increases system availability/utilization time

· Small footprint (only 25” X 28”) which takes up very little Fab space

· Low temperature processing which eliminate thermal damage

· Phase and magnitude detectors which provide “real time” RF impedance for efficient match control and better power to load transfer

· Time or absolute end point detection system which reduces risk of over etching/under etching.

APPLICATION ( Video )

· Photoresist stripping:

High Dose Implant (As+. B+, P+)

Gallium Arsenide substrates 2, 3, and 4”

Deep UV, flood exposed

Post Aluminum Dry Etching

Reworks

CD monitors

· Controlled Resist Removal

Uniform Stripping +/- 10%

Uniform Descum +/- 5&

Dry/Wet process capability

Resist Planarization

Uniformity cap at 5% 1 sec

· Thin Film head resist cleaning and surface treatment

· Up to 4 hrs. of MEMS process

SPECIFICATION ( Video )

· 2 to 6” wafers capability

· Range for Photoresist strip is 150 to 250 deg C +/- 5 deg C

· Range for Descum is 70 to 150 deg C +/- 5 deg C

· 2 MFC configuration with 3^rd MFC option for Forming gas (O2 for strip/descum)

FACILITY ( Video )

· Electrical: 190 to 240 VAC (voltage tap selection), 50 or 60 Hz, single phase, 30A

Electrical receptacle: L6-30R

Maximum power: 6.3Kw

Normal power usage: 2.1 Kw

Isolated grounding, #10 AWG with THHN insulation

Grounding resistance <10 Ohm at 50 or 60 Hz.

· Process vacuum pump requirement: 30 cfm (845 L/min), KF40 inlet

Electrical: 208 VAC, 1 phase, 20A

· Robot vacuum pump requirement: constant 25 in Hg, ¼” Swagelok fitting (stand alone or house vacuum)

· Environmental requirement: A/C during operation min 60 deg F (16 deg C) and max 80 deg F (27 deg C)

· A/C at idle min 60 deg F (16 deg C) and max 80 deg F (27 deg C)

Humidity: non-condensing, at 68 deg F (20 deg C), min @ 20% and max @ 60%

· Closed loop temperature controller:

Temperature range: 20 to 100 deg C

40% Ethylene Glycol and 60% Distilled Water

Flow requirement: 8 LPM

Cooling capacity: at 20 deg C, 5000 BTU (1466w)

Pressure adjustment: 0 to 80 psig

Heater capacity: 2 Kw

Chamber capacity: 1.5 gal (6 L)

Tube inlet and outlet fittings: 3/8” compression Swagelok

Pipe material: polypropylene tubing

· Heat Dissipation:

Main Console: 4500 BTU

Closed loop temp. Controller: 6000 BTU

· RF Generator

Freq.: 13.56 Mhz

208 VAC, 1 phase, 20A, 600 watts

Coolant flow requirement: 2GPM (7.6 LPM) @ <60 psi

Water temperature: max 27 deg C

Water inlet and outlet fittings: 3/8” compressed Swagelok

· House Exhaust for Process module cabinet and Pumps

Greater than 100 cfm flow

4” (10cm) OD

Exhaust must be dampened <200 cfm

Separate exhaust drops for Main console and pumps

Isolated exhaust for process module and vacuum pump

· Gases:

O2: 99.83% purity

8 to 10 psig

Gas regulator set at <30 psig and <10’ from process chamber module

Consumption: 5 LPM

¼” VCR, 316 SS process piping required with .2um point of use filter

N2: .2% Gaseous impurity, 60 to 80 psi, ¼” compressed tube fitting (Swagelok)

Process pipe material: 316 SS

Consumption: 17.5 LPM (35.5 CFH)

Point of Use filter: .2 um

WEIGHT/DIMENSION/FOOTPRINT/SPACE REQUIREMENT ( Video )

· Main Console Weight: 100 lbs. (45 kg.)

· Power Supply Console Weight: 310 lbs. (141 kg.)

· Dimensions: Main console: 25” Width (64 cm) X 58” Height (147 cm) X 28” Depth (70 cm)

· Dimensions: Power supply console: 25” Width (64cm) X 28” Depth (71cm) X35” Height (89cm)

· Footprint: 25” Width (64mm) X 28” Depth (70cm). Requires rear clearance of 14” (35cm) for plumbing and 18” (46cm) for servicing. In addition side clearance of 6” (15cm) and top clearance of 12” (30.5cm) are also necessary.

New Matrix 105RVS Upgraded Matrix 105 VS Original Matrix 105

Comparing Item	New	Upgraded	Original Matrix 105
Comparing Item	Matrix 105R	Matrix 105	Original Matrix 105
Wafer Transfer	Equipe Solid Robot	Frog Robot	Frog Robot
Robot Control	Robot controller with PC, more stable	New robot control board, easy to trouble shooting	Old robot control board
Cassette Station	Solid cassette station, no trouble shooting	Elevator station	Elevator station
Wafer Aligner	Yes, much better performance	None	None
RF interfere	No	Some time	Some time
Frame	New	Used	Used
Controller	New PC	New PC	Z-80 MPU
Monitor	Touch Screen	17" LCD	OLD
User Interface	GUI	GUI	Text
Data Storage	Store in Hard Disk	Store in Hard Disk	None
Recipe Edit	Easy to edit with GUI	Easy to edit with GUI	Magnetic Card
On Line Help	Yes	Yes	None
Gas Calibration	Easy to do with GUI	Easy to do with GUI	None
Diagnostic Function	More functions and I/O hardware "exposed" for easier maintenance and trouble shooting	More functions and I/O hardware "exposed" for easier maintenance and trouble shooting	Limited
A/D Precision	14-16bits	14-16bits	12bits
PCB	Only one, new, not next to chamber, more stable	Only one, new, stable	5 original used PCBs, pain
Valves	New	Used	Used
Meters	New	Used	Used
MFC	New	Calibrated	Calibrated
Gas lines	New	Polished	Used
Chamber	New	Re-anodized	Used
Chuck	New	Re-anodized	Used
Heat Element	New	Used	Used
Door	New	Re-anodized	Used
O Ring	New	New	Used
Quartz chamber	New	Used	Used
Quartz Buffer	New	Used	Used
RF Power	New	Used	Used
RF Match	New	Used	Used
RF Electrode	New	Used	Used
Pump Ring	New	Re-anodized	Used
Bottom plate	New	Used, cleaned	Used
AC/DC/Pressure/Temperature Modules	AC/DC/Temperature in one new module, PCB pressure control, compact, easy trouble shooting, more stable	AC/DC/ New Pressure/Temperature Modules, more stable	Used modules, not stable
Temperature measure precision	±1.5 °C	±1.5 °C	±5.0 °C
Temperature control repeatability	±1.5 °C, New Eurotherm	±1.5 °C, New Eurotherm	±5.0 °C, used old Omega
Cables	New, stable	Used	Used
Wires	New, stable	Used	Used
Other Components	New	Used	Used
Uniformity	0.05	0.05	0.1
Stability	Much Better	Better	Limited
Overall Space	Main Console	Main Console plus PC	Main Console