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System Description:

The Rainbow 4720 is a fully automated, single-wafer plasma  barrier metal/alloys (such as Titanium / Tungsten) etching system that processes 4-, 5-, 6-, or 8-inch wafers and features top
powered electrode plate, programmable electrode spacing, and automatic wafer alignment and placement. The Rainbow 4720XL etcher includes
the above listed features, plus, a high efficiency magnetically levitated turbo pump.The Rainbow 4720 etcher comes with Envision operator interface.Designed for continuous operation, the Rainbow 4720/4720XL etcher is computer-controlled, allowing either manual or automatic control.

Wafer Transport

The wafer transport system is responsible for moving wafers through the system. It picks up a wafer from a cassette on the send indexer, centers and aligns it, transports it to the chamber for processing, and finally, when processing is complete, deposits it into a cassette on the receive indexer. Major assemblies in the wafer transport system include send and receive indexers, a load station that centers and aligns the wafer,
and entrance and exit loadlocks with mechanical arms.

 

 

Operator Controls

 

The operator controls consist of control panels with switches andindicator lights, and a computer-controlled operator interface that runs Envision software.The etcher uses software to control machine functions, record and run process recipes, and warn of conditions that require the attention of an
operator or maintenance technician. Envision software has a graphical user interface (GUI) that employs a combination of icons, buttons, and selectable commands, together with detailed graphics.

Please find the locations of the control panels, CRT display, and keyboard for the operator interface. The rear (auxiliary) control panel is located in the upper right corner, when facing the back of the etcher. On some Rainbow 4720/4720XL operator interfaces, an optional light pen is also provided.