|
Condition:Used (Refurbished and warranty is available). Contact Us for more information.
Wafer Size Capacity:3 to 8 inch
Aura 3010.The Aura 3010(Aura3000) is a single-wafer downstream photoresist asher, delivers high ash rates with low damage, a large process window, and a choice of process temperatures during the ashing process. The system has a user friendly menu-driven user interface, and is suitable for automation via SMIF (Standard Mechanical Interface) or AGV (Automated Guided Vehicle).3¡±, 4¡±, 5¡±, 6¡± and 8¡±wafer capability .
-
No RF damage (¡ê0.1 volt CV shift)
-
High throughput
-
Front and backside etching
-
Excellent etch rates and uniformities
-
150mm ¨C 200mm wafer capability
-
3 gas MFC
-
Variable platen temperature
-
Alumina (ceramic) plasma tube
-
Well-characterized process
-
Multiple step process capability
-
High capital productivity.
-
Chamber wall heated and temperature controlled to make better repeatability.
|
| Inquiry
Sales Contact: Phone: 001-408-988-5188 E-mail: sales@allwin21.com
