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MRC 903A Sputter System(Manufacturer:MRC)
ALLWIN21’s AW-MRC903 Controller is the direct replacement of the original MRC903A Computer System. The Controller uses 900A systems’ original cables (I, D,E, and F) and works with existing 900A systems’ Analog boards. It also has the capability to control up to four MFCs and one external Hi-Vac controller.
ALLWIN21’s AW-MRC903 Controller
the Original MRC903A Controller
Key Features of upgraded system include:
- Plug and Play.
- Precise Scan Speed, RF/DC Power, Gas Pressure, and Hi-Vac Control.
- Easy to read GUI interface with Touch Panel display.
- Consistent wafer-to-wafer process cycle repeatability.
- Easy Recipe edit with Recipe Validation function.
- Small footprint and energy efficiency.
- Automated Calibration for Scan Speed and RF/DC Power.
Advantages of upgraded system include:
- Integrated process control system
- Real time graphics display
- Real time process data acquisition, display, and analysis.
- Programmed comprehensive calibration and diagnostic functions.
Comparisons between new upgraded system from Allwin21 Corp. and old system(Manufacturer:MRC)
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Software Function
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Controller Computer
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Single Board Computer
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Pentium Class Computer
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User interface
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Simple display panel with limited information
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GUI interface with Touch Panel Display
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Data Storage
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No
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Hard Disk storage
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Network function
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No
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Transfer data to server by EtherNet
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Recipe Edit and storage
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Slow with no Validation. Cannot store Recipe for future use.
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Fast with Recipe Validation. Can store Recipe for future use. All process information is saved after each run.
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Software WATCHDOG
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No
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Yes
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Calibration Function
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Scan Speed
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Manual calibration
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Software Auto Calibration and easy to be done
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DC/RF Power Calibration
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Manual calibration
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Software Auto Calibration
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Diagnostic Function
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Use Original Diagnostic Panel.
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Use Software Diagnostic function. Has Auto/Manual mode. Manual mode allows user to control 900A system using original diagnostic panel. Auto mode allows user to control 900A system using real-time GUI.
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Computer Boards
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Use multiple computer boards. Replacement boards are hard to find and expensive. Hard to troubleshoot.
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Only use one computer board and easy to replace. Hardware I/O is exposed for easier maintenance and troubleshooting.
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Status Detection
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Gas feedback detect
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No detecting and display in process
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Real-time detection and display.
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Sensor/Interlock status detect
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No
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Sensor/Interlock status detect function and display
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Real-time display
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No
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Yes
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Software - Main Menu
Software – Diagnostic Menu
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Software – Recipe Menu
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| Inquiry