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Micrion FIB model M9500


Other CD-SEM/SEM/FIB 

Condition:

- Fully Refurbished by many years experienced technicians.
- Guaranteed to meet or exceed OEM specifications
- 3 MONTH warranty and specifications guarantee.
- Installation, training, service, and support available worldwide!

 

The Micrion 9500 is a highly sophisticated Focused Ion Beam System and is capable of performing very delicate microsurgery and cross-sectioning.  

 

 

  • Fine Focused Ion Beam (5nm spot size) can make fast and precise drills and cuts. High resolution imaging makes this system unique for failure/structural analysis.  
  • Well designed deposition system yields reliable interconnections and isolation depositions.  
  • An electron neutralizer eliminates the damages caused by charging effects.  
  • Gas-enhanced etching greatly accelerates the processes and makes selective etching possible.  

    Configuration:

    .FEI / Micrion 9500 Focused Ion Beam System
    .Ion Beam Data: Ga, 50kV, 5nm column, 20nA
    .Specimen stage: 200mm x 200mm, 5 axis
    .Detector: MCP
    .Computer/Software: RS6000,AIX 3.15 OS Microsurgery 1.6.4
    .GAS: Metal deposition, insulator deposition, insulator etch and metal etch
    .Vacuum System: Turbo with mechanical roughing pump
     

    Please contact us for more information by sales@allwin21.com 

     

    SEM:
    Zeiss/Leo 435VP - W SEM, variable pressure
    Zeiss/Leo DSM982 FE SEM
    Hitachi S-4500 - FE SEM, Type I and Type II
    Hitachi S-4700 - FE SEM, Type II
    Hitachi S-4800 - FE SEM, Type II

    CD/SEM:
    Hitachi S-8820 for 5", 6" or 8", Silicon or GaAs wafers
    Hitachi S-8840 for 5", 6" or 8" , Silicon or GaAs wafers
    Hitachi S-9300 for 6", 8" or 12 " Silicon wafers

    FIB:
    FEI/Micrion M9100 Workstation, Gas box optional
    FEI/Micrion M9500 Workstation, Gas box optional
    Seiko 8300 FIB
    Seiko 8100 FIB

     

     

     

     

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