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Other CD-SEM/SEM/FIB
Condition:
- Fully Refurbished by many years experienced technicians.
- Guaranteed to meet or exceed OEM specifications
- 3 MONTH warranty and specifications guarantee.
- Installation, training, service, and support available worldwide!
A Cold Field Emission Gun Scanning Electron Microscope (FEGSEM) of "below-the-lens" design capable of (manufacturer's claims) 1.5 nm resolution at 15 kV, 12 mm W.D.; and 2.5 nm resolution at 1 k, 2.5 mm W.D. Magnification ranges from 30X to 500,000X. Specimen tilt at 12 mm W.D up to 45 degrees. Electron source is a cold FE gun producing high brightness (~ 2 X 109 A / cm2/sr) with little energy spread (0.2 - 0.3 eV). The "below-the-lens" design and large sample chamber port permits samples as large as 100 mm diameter X 17 mm thick H. Oil-free vacuum systems pump column and sample exchange. Available image modes include secondary and backscattered electron images. There are two secondary electron detectors; one above the objective lens, the other below. Digital images may be acquired in BMP, TIFF, or JPEG file formats at 640 X 480, 1280 X 960, or 1560 X 1920 pixels.
An Emitech cryo stage is available for use with samples prepared in the Emitech K-1250 Cryopreparation / Cryotransfer System shown below.
Equipment / Accessories
- Hitachi S-4700 with a variety of non-cryo sample holders
- CryoSEM observation using Emitech Cryo Stage, Model K-1250 Cryopreparation System, and a variety of sample holders
- Backscatter imaging at TV rates and low voltage (threshold 2.5 kV on gold) with Autrata modified YAG (yttrium aluminum garnet, cerium doped) crystal
- Keithly Specimen Current Detector
Applications
- High-resolution topographic contrast (Se) and atomic number contrast (BSe) imaging of biological and non-biological samples in both room temperature and cryo modes
- Applicable to imaging of immunogold labeled individual cells and bacteria
Specifications
| Secondary electron image resolution |
| 2.1 nm guaranteed (at 1 kV) |
| 1.5 nm guaranteed (at 15 kV and W.D. 12 mm or X-ray analysis position) |
| Backscattered electron image resolution (optional) |
| 3.0 nm guaranteed (at 15 kV YAG detector, optional) |
| Cold finger and specimen exchange chamber as standard. Allowing sample exchange via airlock without repositioning |
| Optional integrated EDX system with 30 degree take-off angle |
| Fully digital imaging, image processing and archiving system |
| Dual SE detectors for versatile imaging (SE and BSE) |
| ExB energy filter |
| The S-4700 FE-SEM combines the versatility of PC control with a novel electron optical column to give exceptional performance on large and small specimens. Resolution of 1.5nm at 15kV is guaranteed at the EDX and specimen exchange position of 12mm working distance! |
The S-4700 also offers excellent low kV performance with guaranteed resolution of 2.1 nm at 1 kV, at a working distance of 1.5mm. Two versions, Type I and Type II, are available, differing in the specimen stage size. The S-4700 Type II features a five axis eucentric motorized stage which will accommodate specimens up to 150 mm in diameter. |
Pre-programmed operating modes allow the user to switch from high-resolution conditions to microanalysis conditions at the click of the mouse with no change of objective aperture. The fully integrated new ExB filter opens the door to low voltage, high resolution, backscattered imaging never before possible on a conventional SEM. |
| Sample tilt of 45 degrees without change in working distance |
| Convenient and useful beam shift of +/-15um |
| Electron optics |
| Electron gun |
Cold field emission electron source |
| Acc. Voltage |
0.5 |
| 30 kV (variable at 0.1 kV/step) |
| Probe current |
1 pA |
| 2 nA (depends on Acc. voltage) |
| Magnification |
x 20 |
| x 500,000 |
| Objective aperture |
Heated aperture, 4-openings, selectable and alignable outside the vacuum |
| Specimen Size |
2" |
4" or 6" |
| Specimen stage |
Type I |
Type II |
| Traverse |
X: |
0 |
0 |
| |
|
25 mm |
100 mm |
| Y: |
|
0 |
0 |
| |
|
25 mm |
50 mm |
| Z: |
|
1.5 |
1.5 |
| |
|
26.5 mm |
30.0 mm |
| T: |
|
-5 |
-5 |
| |
|
+45 degrees |
+60 degrees |
| R: |
|
360 degrees |
360 degrees |
| Drive: |
Manual |
PC-controlled 5 axis |
| motor drive |
| Image display |
| Operation/display |
PC/AT compatible, OS: Windows 2000(R)* |
| Large color CRT |
| Scan mode |
Normal, Split/dual mag./line scan, position |
| set, spot, AAF, SAA, oblique |
| Frame memory |
640 x 480 pixels, 1,280 x 960 pixels, |
| 2,560 x 1,920 pixels |
| Image filing |
Image data base with various reference |
| functions built-in |
| Image file format |
BMP, TIFF, JPEG selectable |
| Scan speed |
TV, slow (0.5 ~ 40 s/frame) for viewing |
| Slow (40 ~ 320 s/frame) for recording |
| Image processing |
Automatic image brightness & contrast, |
| raster rotation, autofocus, auto-stigmation, |
| averaging, frame integration, color display |
| Auto data recording |
Film numbering, acc. voltage, micron bar |
| with a scale, magnification, date, hours and |
| working distance |
| Electrical image shift |
| ±15 µm (at W.D. = 12 mm) |
| Vacuum system |
| System |
Automatic vacuum sequence |
| with pneumatic valve controls |
| Vacuum |
|
| 10-4 Pa (specimen chamber) |
|
| Pumps |
Fore pumps 140 l/min (168 l/min) |
| x 2 sets, ( ) is for 60 Hz operation. |
| Diffusion pump 570 l/s x 1 set, |
| and Ion pumps x 3 sets |
| Protection |
System protection against power, |
| water and vacuum failures. |
Please contact us for more information by sales@allwin21.com
SEM:
Zeiss/Leo 435VP - W SEM, variable pressure
Zeiss/Leo DSM982 FE SEM
Hitachi S-4500 - FE SEM, Type I and Type II
Hitachi S-4700 - FE SEM, Type II
Hitachi S-4800 - FE SEM, Type II
CD/SEM:
Hitachi S-8820 for 5", 6" or 8", Silicon or GaAs wafers
Hitachi S-8840 for 5", 6" or 8" , Silicon or GaAs wafers
Hitachi S-9300 for 6", 8" or 12 " Silicon wafers
FIB:
FEI/Micrion M9100 Workstation, Gas box optional
FEI/Micrion M9500 Workstation, Gas box optional
Seiko 8300 FIB
Seiko 8100 FIB |
| Inquiry