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4  Rapid Thermal Process
 
·LEDs Production RTA RTP-AW810
·Refurbished AG Heatpulse 210
·Refurbished AG Heatpulse 410
·Refurbished AG Heatpulse 610
·Refurbished AG Heatpulse 21XX
·New AccuThermo AW 810M
·New AccuThermo AW 610
·New AccuThermo AW 410
4  Plasma Asher Stripper Descum
 
·Refurbished Matrix 205
·Refurbished Gasonics Aura 3010
·Refurbished Branson IPC 3000
·Refurbished Matrix 10
·Refurbished Gasonics L3510
·Refurbished GaSonics Aura 2000LL Loadlock Asher
·Branson IPC L3200-Long time Plasma Asher Process
·Refurbished Gasonics Aura 1000
·Refurbished Matrix 105
4  Plasma Etch
 
·Lam Autoetcher 590
·Lam AutoEtch Lam 490
·Refurbished Tegal 901e
·Refurbished Matrix 303
·Refurbished Matrix 403
·Refurbished Gasonics AE 2001
·Lam Rainbow 4520 Oxide Etch
·Lam Rainbow 4428 for Plasma Etch
·Lam Rainbow 4420 Plasma Etch
4  Reactive ion etching (RIE)
 
·Plasma Therm VII 70 Series
·Refurbished STS 320 RIE
4  PECVD
 
·Refurbished STS 310 PECVD
4  Inductively coupled plasma (ICP)
 
·Refurbished STS 320 ICP
4  Metrology & Inspection
 
·Hitachi S8840 Scanning Electron Microscope
·XFlash® QUAD 5040 Detector
·XFlash® 5030 Detector
·XFlash® 5010 Detector
·Energy Dispersive X- Ray Spectrometer QUANTAX 200
·LEO FE-SEM model 982
·Micrion FIB model M9500
·Hitachi FE-SEM model S-4160
·Hitachi FE-SEM model S-4700
·Hitachi S-4500 SEM Cold Field Emission SEM System
·Hitachi S-8820 CD SEM
·Hitachi S-9300 CD SEM_SDI
·Hitachi S-4800 SEM Cold Field Emission SEM System
4  Misc.
4  Backside Equipment
4  Lab Equipment
 
·Muffle Furnaces (400-1800C)
·Tube Furnaces (1-5 Zone)
·Hi-Pressure Furnace
·RTP Furnaces
·Dental Sintering Furnaces
·Induction heaters&CZ grower
·Lab Ovens / Hot Plates
·Melting Furnaces
·Cutting / Dicing Saws
·Polishing Machines
·Desktop Machine-shop
·Glove Box
·Film Coaters
·Lab Press & Rollers
·Laboratory Mill / Mixer
·Battery / Capacitor Analyzers
·Desk-Top X-Ray Instruments
·Digital Microscopes
·DI Water / Ultrasonics
·UV Equipment & Adhesives
·Lab Ware / Accessory
·Round Wafer Carriers
·Sticky & Film Boxes
·IC Tray & Plastic Boxes
·Vacuum Pen&Tweezers
4  Electrical Test and PCM Software
 
·Electronic Tester List
·Temptronic TP03500
·HP 4142B
·Refurbished HP 4145B
·Refurbished HP 4062UX
·Refurbished HP 4155
4  Sputtering and Evaporator System
 
·Upgrade MRC903A Sputter System
4  Lithography & Photoresist
 
·IOS.Cube 6 | Series
·IOS.Cube 5 | Series
·IOS.Cube 3 | Series
·IOS.Cube 2 | Series
·IOS.Cube 1 | Series
4  Wet Processing
 
·SV-702 Spin Rinse & Dryer (SRD) system
·SV-802 Spin Rinse & Dryer (SRD) system
·ASD-SH-802 Horizontal Spin Dry-In
4  Wafer Probers
 
·Refurbished EG 4085X
·Refurbished EG 1034
·Refurbished EG 2001
·Refurbished MP 2020
·Refurbished EG 2010
4  Chiller
4  Pump
4  RF Power
4  Oven
4  Gas Cabint
4  Inventory on Sale
4  Gallium Nitride Material
 
·free-standing GaN substrate
·GaN Templates
4  Bulk Equipment on sale
 

Rapid Thermal Processing in Solar Cell

 Allwin21 Corp. Merits of AccuThermo RTA RTP 

We sold many AccuThermo AW-410,AccuThermo AW 610 ,AccuThermo AW 810   in Solar Industry for developing new next  generation solar cell process,such as First Solar, BP Solar, Applied Materials, Sigen , GE Energy, IBM,Stanford University,UC Berkeley,California University, Senergen Devices,  Sierrasolarpower , NB Technologies GmbH(Germany), Cranfield University(UK), IFE Kjeller(Norway),IMEC(Belgium),

 

 

Recently, RTP-like processing has found applications in another rapidly growing field — solar cell fabrication. RTP-like processing, in which an increase in the temperature of the semiconductor sample is produced by the absorption of the optical flux, is now used for a host of solar cell fabrication steps,  ncluding phosphorus diffusion for N/P junction formation and impurity gettering, hydrogen diffusion for impurity and defect passivation, and formation of screen-printed contacts using Ag-ink for the front and Al-ink for back contacts, respectively. 

Some solar cell companies have successfully applied our advanced Rapid Thermal Processing (RTP) technology to its process for creating highly efficient and durable CIGS solar cells. This eliminates a key process bottleneck found in many state-of-the-art process implementations and enables the use of low-cost substrates in ways that were not considered possible before.

In Rapid Thermal Processing, a layer is heated for a very brief period only in a highly controlled way. For instance, RTP techniques can flash-heat a layer for just several picoseconds and put energy just into the top several nanometers of a layer in a highly controlled way -- while leaving the rest of the layer unaffected.

RTP has a secondary benefit of reducing the energy payback time of their solar cells to less than two months (for the full panel). By comparison, a typical silicon solar panel has an energy payback time of around three years, and a typical vacuum-deposited thin-film cell has one of 1-2 years. The energy payback time is the time that a solar panel has to be used in order to generate the amount of energy that it required to be produced.

Articles on Rapid Thermal Processing for Solar Cell:

 

  1. RAPID THERMAL PROCESSING IN SILICON: MICROELECTRONICS TO SOLAR CELLS

  2. Rapid Thermal Processing of Silicon Solar Cells -Passivation and Diffusion

  3.  Solar Cells on EFG and String Ribbon Silicon by rapid thermal processing 

  4.  Lamp-based Processing Technologies for Silicon Solar Cell Manufacturing  

  5.  Boron Back Surface Field Using Spin-On Dopants by Rapid Thermal Processing

  6.  RAPID THERMAL PROCESSING OF HIGH EFFICIENCY N-TYPE SILICON SOLAR CELLS WITH AL BACK JUNCTION

     

    Allwin21 is the exclusive licenced manufacturer  for AG Heatpulse 610.  Allwin21 is manufacturing the AccuThermo AW-410,AccuThermo AW-610,AccuThermo AW 810,originally the AG Heatpulse 610.The AccuThermo AW-410,AccuThermo AW-610,AccuThermo AW 810 have innovative software and more advanced temperature control technologies. 

             

       AccuThermo AW-410           AccuThermo AW-610                                      AccuThermo AW 810

     

    RTP Typical Application Area v 

    • v Chip Maufacture
    •  Compound IndustryGaAs, GaN, GaP, GaInP,InP and SiC
    • v OptronicsPlanar optical waveguides,LASERs,LEDs and VCSELs
    • v Biomedical
    • v MEMS
    • v Nanotechnology

    For a bibliography and reprints of technical journal articles regarding these  applications, contact the Allwin21 Corp. Marketing Communications Department.

 
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