Manfacturer:Tencor/KLA-Tencor
Refurbished:Allwin21 Corp.
Refurbished Tencor/KLA-Tencor M-Gage 300 without printer.
· Non-Contact Wafer Monitor for Sheet resistance.
· Can accommodate up to 6".
· Measurement range: 1m ohm/square to 2,000 m ohm/square.
· 115v, 60 Hz
Upgrading M-Gage 300 with AW software package and touch screen panel computer with 12” monitor.
The new system can save the data with list and the map in the computer one wafer by one wafer.
The new system remove the digital data converter, operator can dial the resistivity in the test set up recipe, run different recipe for Al, ti, Tin etc . Still run 5 points if the orignal is used for 5 points only.
Tencor m-gage/sonogage 200/300 series Systems are used by the Semiconductor Industry for non-contact metrology measurement. The system is used to measure the sheet resistance and thickness for the conductive thin film.
New upgraded Tencor m-gage/sonogage 200/300 system is getting rid of the old digital logic controllers to use new Pentium PC computer with DOS-WINDOW graphics GUI, which has touch screen capability.
The new software improves system availability by decreasing the MTTR with fully integrated diagnostics and visual aids for system maintenance. The new operating system uses Touch panel Pentium computer components. Improved system availability, productivity and efficiency are achieved providing for a lower cost of ownership. All is attained without affecting your established measurement performance of the system.
This system after upgraded with new software included a Touch panel Pentium computer with integrated process control system with real time graphics display, recipe editing and validation, and real time process data acquisition, display, and analysis, and comprehensive calibration and diagnostic functions.
The new performance of the Tencor m-gage/sonogage to the old system:
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No.
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Discretion
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Original old system
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New upgraded System
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1
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Controller Computer
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Logic circuit without any Micro-Processor chip
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Touch panel Pentium computer
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2
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User interface
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4 digital meter and printers
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GUI interface
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3
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Data Storage
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No
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Save all process data on the computer hard disk
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4
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Recipe edit and storage
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Manually dial with switch the resistivity for measuring thickness
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It is easy to edit recipe with GUI and resistivity for measuring thickness. It can save a lot of recipe in the hard disk.
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5
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GEM/SECS II function
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No
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Yes
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6
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On line help
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No
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On line help with different languages
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7
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Diagnostic
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No
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More functions and I/O hardware “exposed” for easier maintenance and trouble shooting
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8
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Wafer Transport movement diagnostic
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Not easy with bit switch to select each bit
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Easy to use and user interface friendly with control buttons for all kinds of tests.
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9
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A/D precision
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12 bits
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16 bits
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10
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Calibration
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Not easy
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Software calibration and easy to be done
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11
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Error Message
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No
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More detail error message display on the screen to make trouble shooting much easier
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12
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Change Measuring points
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Need different disk for different wafer size and different points
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Use one universal disk for 3,5,9 points edit in the recipe
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Contact by sales@allwin21.com for more information.
The Tencor m-gage/sonogage represents the Industry Standard in single-wafer measurement and the mainstay of the highly successful m-gage series family. Keep the original boards in the head area include motor drive. The 4 existing control boards in the main body underneath the head part are physically removed and replaced by a more powerful operating system with Pentium PC. Benefits include "Real Time” Data Storage, Statistical Data capabilities, Recipe Storage, and multiple users’ levels. Data storage capabilities include Lot information, recipe data/wafer, wafer profile data, and error logging. |
| Inquiry