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Inventory >> Metrology & Inspection >> Hitachi S-4500 SEM Cold Field Emission SEM System

Hitachi S-4500 SEM Cold Field Emission SEM System

Click to Enlarge

Condition:

- Fully Refurbished by many years experienced technicians.
- Guaranteed to meet or exceed OEM specifications
- 3 MONTH warranty and specifications guarantee.
- Installation, training, service, and support available worldwide!

- Model: S-4500 SEM
- Field Emission Scanning Electron Microscope (FE-SEM)

Specifications:

Performance:
 Secondary electron image resolution: 1.5 nm at 15kv
 Magnification: 20X - 500KX
Electron Optics:
 Electron gun: Cold field emmission source
 Lens type: electromagnetic
 Objective aperture: 4 position externally selectable
 Stigmator: Octopole electromagnetic
 Scanning coil: 2-stage electromagnetic
Sample Chamber
 Size: Type I
 Airlock: prepumped, max sample size:50 mm diameter
 Stage motion: 5 axis manual
X/Y: 25 mm, Z: 3-28 mm, T: -5Deg - +45 Deg., R: 360 deg continuous
 Draw-out door: Max sample size:150 mm dia.
 Size: Type II
 Airlock: prepumped, max sample size:100 mm or 150 mm diameter
 Stage motion: 5 axis manual
X/Y: 100mm/50 mm, Z: 3-33 mm, T: -5 Deg - +60 Deg., R: 360 deg continuous
Display system:
 Image display: Dual 12" monitors
 Scanning mode: Normal, reduced area , line scan, photo scan, spot position, split screen
 Scanning speed: TV, 0.3, 2, 9, 25, 35, 100, 160 320 s/frame
 Signal processing:Real-time processing, auto-brightness and contrast control, dynamic stigmator, sutofocus, a
   Frame averaging, frame integration, contrast conversion, 
Vacuum system:
 Full automatic operation with pneumatic valve control
 Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber
 Ion pump: 60 L/s X1, 20 L/s X2
 Speciment chamber: DP (570 L/s); Turbo Optional
 Foreline: Rotary pump X2
Accessories (Optional)
 EDX:at 30 Deg. take off angle
 Digital Image capturing: Orion-6 software, Optional
 Chilled water circulator: 10 - 20 deg C, 1.0 -1.5 L/m for DP only
Installation
 AC: Single phase AC 220 or 240 volt, 50/60 Hz
 Grounding: Independent grounding 100 Ohms or less 

Please contact us for more information by sales@allwin21.com

 

SEM:
Zeiss/Leo 435VP - W SEM, variable pressure
Zeiss/Leo DSM982 FE SEM
Hitachi S-4500 - FE SEM, Type I and Type II
Hitachi S-4700 - FE SEM, Type II
Hitachi S-4800 - FE SEM, Type II

CD/SEM:
Hitachi S-8820 for 5", 6" or 8", Silicon or GaAs wafers
Hitachi S-8840 for 5", 6" or 8" , Silicon or GaAs wafers
Hitachi S-9300 for 6", 8" or 12 " Silicon wafers

FIB:
FEI/Micrion M9100 Workstation, Gas box optional
FEI/Micrion M9500 Workstation, Gas box optional
Seiko 8300 FIB
Seiko 8100 FIB


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