Condition:
- Fully Refurbished by many years experienced technicians.
- Guaranteed to meet or exceed OEM specifications
- 3 MONTH warranty and specifications guarantee.
- Installation, training, service, and support available worldwide!
Hitachi S8840 SEM Consisting of:
- Manufacturer: Hitachi
- Model: S8840
- Wafer Size: 200mm
- Hitachi S8840 CD SEM Mainframe
- CD measuring size: 130-160nm, consistently
- Version 11.7 S/W or newer
- SECS/GEM Communication Interface
- Additional hard disk drive (>1GB)
- VRT board w/ 8 mb of memory
- DSP compatible conductive wafer holder
- Hitachi Hi Tech Electron Gun
- Accelerating voltage, 500V to 1300V, 10V steps
- Probe current, 1-16pA at 800V, 1-10pA at 1000V, 1-13pA at 1300V
- 3 Stage Electromagnetic Lens System
- Objective Lens: 4 opening click stop, heated aperture is selectable/adjustable outside the vacuum system
- 2-Stage Deflection Scan Coil
- Astigmatism correction via an 8-pole electromagnetic coil
- Magnification = 1000x to >150000x
- Field control method ; Continuously on for sample decharging, at all voltages
- Wafer imaging ability; Entire surface of 8"" wafer
- Depth of focus: >= 1.0mm at 80000x magnification
- Resolution: < 8nm at 700V - 1000V (or < 6nm with optional retarding voltage), < 6nm at 1000V - 1300V
-Retarding voltage: Optional at <= 800V for improved resolution
- Hitachi Probe Tip
-Optical Microscope System: Image is Monochrome, using CCD camera, Magnification is 110x, Wafer imaging X & Y coverage from 5–195mm , notch down
- Dual XY Hitachi Microscale
- Workstation, HP B180L
- Error Tracking Software
- Multipoint Measurement Function
- Edge Roughness Function
- Contact Hole Measurement Function
- Automated Image Archiving Function
- Ergonomic Cassette Flipper Option (2 flippers - one per load port)
- Operations Manual and Documentation
Please contact us for more information by sales@allwin21.com
SEM:
Zeiss/Leo 435VP - W SEM, variable pressure
Zeiss/Leo DSM982 FE SEM
Hitachi S-4500 - FE SEM, Type I and Type II
Hitachi S-4700 - FE SEM, Type II
Hitachi S-4800 - FE SEM, Type II
CD/SEM:
Hitachi S-8820 for 5", 6" or 8", Silicon or GaAs wafers
Hitachi S-8840 for 5", 6" or 8" , Silicon or GaAs wafers
Hitachi S-9300 for 6", 8" or 12 " Silicon wafers
FIB:
FEI/Micrion M9100 Workstation, Gas box optional
FEI/Micrion M9500 Workstation, Gas box optional
Seiko 8300 FIB
Seiko 8100 FIB |
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