AllWin21 Corp.

Refurbished STS 320 RIE is a manually plasma Etch system, designed for Research & Development and small scale production. The wafer platen can accommodate a variety of substrate sizes from 50mm up to 200 mm.

The process chamber is configured for sputter and/or reactive etching of a large range of materials including metals, Dielectrics, Photoresist, and many Inorganic and Organic substances. The plasma is producrd via the matching unit into an alumina chamber. This provides a high density plasma capable of operating in a very wide process range.Independent energy control is provided by 13.56 MHz Radio Frequency biasing of the substrate platen via automatic power control and impedance matching.

STS320 system is designed for maximum process flexibility and reproducibility. Process gas is introduced to the process chamber through a showerhead arrangement, which is located in the upper cover assembly. The substrates are placed on the electrode assembly which is powered at 13.56 MHz. Temperature control of the substrate platen which is required for certain processes is achieved using a recirculating liquid system.

STS 320 chamber has been designed to the highest vacuum engineering standards with the number of components kept to a minimum, with particular consideration given to the elimination of virtual leaks. This results in a very stable chamber environment leading to processes of the highest quality.

After manually loading of the wafer into the Chamber, the system automatically carries out pump down, leak check and transfer of the wafer into the process chamber via the carriage assembly, after which the process will be started.
The MULTIPLEX RIE control is via an Industry standard Personal computer. A color monitor displays process information and mimic displays, allowing the system to be operated and continuously monitored. Process recipes are downloaded to hard or floppy disk.

The system is run in automatic mode. In the event of system external service malfunction, one of the comprehensive set of diagnostic legends is displayed, and the machine is automatically placed in a safe condition.

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Allwin21 Corp. can also provide Allwin21 Corp proprietary AW Control Software and Superior Temperature Control Technology to upgrade the refurbished equipment which provides the following significant advantages.

Pressure Control
New hardware includes: New control Board with cable, new timer counter with watch dog, Pentium Computer with 17” LCD Monitor, standard keyboard and mouse.
Software calibration and easy to be done.
More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
It is easy to edit recipe with GUI and graph display.
Save all process data on the computer hard disk.
A/D and D/A precision is 14 to 16 bits.
Detect in process and with color curve displayed on the screen.
Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
Sensor status detect function.
On line help function
Better performance and maintenance than the original STS320 RIE systems
Excellent etch rates and uniformities