Peak ALP 5000

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The tool for Rapid Thermal Process is Peak ALP 5000 (Peak 8500).

The Peak Rapid Thermal Processor or RTP System heats substrates with its SP35X lamp,which sits at top the chamber.Gases can be introduced  into the process chamber ,and with the vacuum option,the pressure within the process chamber can be lowered and raised.Wafers are moved into and out of the process chamber by the system.
The Peak RTP System,therefore,has fivr main function:<br>
1.Temperature control
2.Process gas control
3.Pressure control
4.Wafer transport.
5.User Interface