Fully Refurbished GaSonics L3510 Asher System:
· Wafer Configuration: 6 and 8 inch wafers.
· Cooler (cooling station)
· New quartz,O ring, Heated Platenand Wiring Harness.
· Refurbished Power Supply, Touch Screen, I/O and pressure PCB, LCD and Key Pad, MKS throttle valve.
· Original CPU Card and PCI
· Single cassette processing
· Quartz ware: Chamber, bubbler, diffuser, lamp plate, Spool,
· Collar and gas distribution plate
· Lifter assembly
· Solenoid valves and air cylinders
· Brooks type Zbot 2 pick and place robot
· Calibrated Microwave system, pressure system and Temp control