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Inventory >> Metrology & Inspection >> Ultrapointe Laser Imaging System 1010A

Ultrapointe Laser Imaging System 1010A

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Manufacturer:KLA Tencor Ultrapointe 

Model: 1010A

Condition:Used

Price Terms:AS IS,WHERE IS,Advanced Payment. It is not tested or refurbished.Allwin21 does not test or refurbish the system. They are sold *AS-IS WHERE IS*.Allwin21 accepts no responsibility or liability for the use and/or functionality of it.

Description:

Here is a little writeup on the Ultrapointe 1010, taken from a JDS Uniphase buisiness report...

The Ultrapointe System Solution

The Company established its Ultrapointe subsidiary in fiscal 1992 and began shipping Ultrapointe Systems in fiscal 1994. The Ultrapointe System is a laser imaging system ("LIS") that is capable of examining microscopic defects with the ease and speed of conventional microscopes while also offering increased resolution and the ability to provide three-dimensional ("3-D") images. This system combines state-of-the-art high speed laser scanning technology, real-time confocal imaging and digital image reconstruction to allow for 3-D imaging of semiconductor defects as small as 0.1 micron. The Ultrapointe System works in conjunction with automated inspection systems from vendors such as Tencor and KLA to enable semiconductor manufacturers to more accurately identify and classify defects. This defect examination and analysis procedure enables semiconductor manufacturers to improve yields by identifying and containing process problems. Ultrapointe Systems operate in the manufacturing cleanroom, adjacent to automated inspection ystems, and can in seconds produce detailed images of defects even when they are very small or embedded or buried in films. The Company believes that its Ultrapointe System is the only currently available, non-destructive wafer inspection tool with increased resolution and 3-D imaging capabilities that is capable of both examining certain sub-surface wafer defects and accurately analyzing the sources of defects.

The Ultrapointe System utilizes an optical technique called scanning laser confocal microscopy. This technique uses, through high power microscopic optics, an argon laser as an intense light source to scan a wafer's surface numerous times. The return signal from the laser is processed by the system's computer workstation, which provides a complete opological image of the wafer's surface at the system's console and can display in a high resolution format defects as small as 0.1 micron. Typical magnifications afforded by Ultrapointe Systems approximate 35,000x, as compared with conventional white light microscopes upper magnification limits of approximately 6,000x. Through software developed by the Company, the system's workstation can also evaluate and classify defects, communicate with automated inspection systems and store images and other data.

The Company currently offers two versions of its Ultrapointe System, the Ultrapointe LIS 500, which has a base list price of $275,000, and the Ultrapointe LIS 1010, which has a base list price of $368,000. These products differ primarily in the degree of software image manipulation available to the operator. The systems can also be tailored, through software, to interface with various automated inspection systems and local area networks. The Ultrapointe LIS 500 includes full wafer automation and handling and a Silicon Graphics workstation. The images available include a conventional, real time white light microscopy image, real time laser confocal "slices" and a multiple slice top view of the wafer surface and defect. The full resolving power of the laser images is available and surface, embedded and buried defects can be viewed. This product can be upgraded at any time with advanced two dimensional ("2-D") and 3-D imaging accessories. The Ultrapointe LIS 1010 incorporates all of the features of the Ultrapointe LIS 500 while using a more advanced version of the Silicon Graphics workstation.

More information: sales@allwin21.com 

Amount: 1 set

Price:$9,000.00


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