AllWin21 Corp.

The Lam AutoEtch 490 is a fully automated, single-wafer plasma Silicon Dioxide etching system that processes 4-, 5-, 6-inch wafers and features top
powered electrode plate, programmable electrode spacing, and automatic wafer alignment and placement. Designed for continuous operation, the Lam AutoEtch 490 etcher is computer-controlled, allowing either manual or automatic control.

Lam AutoEtch 690

Manufacturer:Lam Research Model: Lam AutoEtch 690
Condition:Used (Refurbished and warranty is available). Contact Us for more information.

Wafer Size Capacity:4 to 6 inch capacity

System Description:

The Lam AutoEtch 690 is a fully automated, single-wafer plasma metal lead (such as Aluminum, Aluminum Alloy with silicon or both) or barrier metal/alloys (such as Titanium / Tungsten) etching system that processes 4-, 5-, 6-inch wafers and features top
powered electrode plate, programmable electrode spacing, and automatic wafer alignment and placement. Designed for continuous operation, the Lam AutoEtch 690 etcher is computer-controlled, allowing either manual or automatic control.

Matrix 303 Plasma Etcher

Manufacturer:Matrix Integrated Systems Model: Matrix 303

Condition:Used (Refurbished and warranty is available). Contact Us for more information.

Wafer Size Capacity:2 to 4 inch or 4 to 6 inch

Matrix is a Registered Trademark of Matrix Integrated Systems, Inc.The model Matrix303 is an electro-mechanical production system used to down stream etch materials such as nitride, oxide poly-silicon etc. from the surface of silicon or other substrate. Each wafer is processed individually by means a chemical reaction induced by a gas plasma.

Hitachi CD-SEM 8820

Maker:Hitachi

Model: CS-8820 SN :8347-01

Condition:Used,AS IS,Where IS

Price:

Demo is available against appoimtment.

Valid:Subject to sale

Information for reference only.

Surface Tech Sys (STS) Multiplex ICP

STS MultiplexInductively-Coupled Plasma (ICP) Advanced Silicon Etch (ASE) System which meets OEM SPEC.

Manufacturer:Surface Tech Sys

Condition:Used (Refurbished and warranty is available). Contact Us for more information.

S/N: 03843 05743

Fully Refurbished Lam Rainbow 4420/4428 Plasma Etcher/RIE

Model:Fully refurbished Lam Rainbow 4420/4428 Plasma Etcher/RIE

Maker:Lam Research

Condition:Fully Refurbished by Allwin21 Corp.

Lead Time:6-8weeks

Price:We will do our best to meet your budget.Please contact us by e-mail.

Warranty: 6 to 12 months non-consumable parts warranty.

Amount in stock: 4 sets

Fully refurbished and upgraded Perkin-Elmer 4400, Perkin Elmer 4410,Perkin-Emler 4450,Perkin Elmer 4480 Sputtering Systems

All our Sputtering Deposition System : AccuSputter AW 4450 | Perkin Elmer 4450 | Perkin Elmer 4410 | Perkin Elmer 2400

Model:Fully refurbished and upgraded Perkin-Elmer 4400, Perkin Elmer 4410 Sputtering Systems

Maker:Perkin Elmer

Condition:Fully Refurbished and upgraded by Allwin21 Corp.

Lead Time:6-8weeks

Price:We will do our best to meet your budget.Please contact us by e-mail.

Warranty: 6 to 12 months non-consumable parts warranty.

Amount in stock: 1 set

New AccuSputter AW 4450 Sputtering System

All our Sputtering Deposition System : AccuSputter AW 4450 | Perkin Elmer 4450 | Perkin Elmer 4410 | Perkin Elmer 2400

Model: AccuSputter AW 4450 Sputtering System

Maker:Allwin21 Corp.

Condition:New

Lead Time:6-8weeks

Price:We will do our best to meet your budget.Please contact us by e-mail.

Warranty: 12 months non-consumable parts warranty.

Amount in stock: 10 sets

New Perkin-ELmer 44XX Series Sputtering Deposition Systems

http://www.allwin21.com/Item.asp?catid=34&id=373

The AccuSputter ^® AW 4450-Series Production Sputtering Systems are manufactured in the configuration of a manually-loaded system capable of fully automatic operation. The AccuSputter ^® AW 4450 sputtering head is equipped with three Delta^TM cathode or four round 8-inch positions ( Mo flame sprayed shields and shutters standard).

The AccuSputter ^® AW 4450-Series Production Sputtering Systems deposit a wide variety of materials onto substrates such as ceramic, metal, plastics, glass and semiconductors. The system can also be used for RF sputter-etching, a process in which material is removed from, rather than being deposited on, the substrates prior to sputter deposition.

These sputtering systems sequentially deposit thin films of up to three or four different materials onto a single substrate, thus attaining sandwich-structured films such as multi-layer optical interference filters or semiconductor devices. Resulting thin films range in thickness from a few Angstroms up to several microns.

Description of Features:

Advanced AccuSputter ^®AW4450 Controller with GUI mounted in the main frame;
Manual, Semi and Automatic one button operation;
Customer programming of recipe for process parameters.
GEM/SEC II functions (Optional)
24V DC control components
DC Gear Motors for table rotate and carriage moving;
Advanced vacuum gauges and control system;
MFC gas control system;
Advanced RF automatically matching network;
DC and RF power are mounted in the main frame;
Fast Cycle Load Lock Operation ;
High rate Delta^TM DC magnetron sputtering;
High throughput operation: Automated load lock and controller sequences provide for efficient pump down and pallet transfer to process chamber
High uniformity: ±7% deposition uniformity guaranteed with water-cooled rotating annular substrate table; ±5% achievable.
Ultra-clean vacuum: Cryopumped and Meissner-trapped process chamber ensures contamination-free conditions especially important for critical processes such as the deposition of aluminum and platinum;
Easy maintenance: Removable deposition shields permit easy system cleaning. Automatic cryopump regeneration minimizes downtime and inconvenience;
Specialized pallets for ease of substrate leading/unloading;
"Drop in" target for quick target changes, no screw to both with;
"Snap-out" deposition shields for quick, easy maintenance;
Fail-safe system protection

Surface Tech Sys Multiplex ICP

Manufacturer:STS (Surface Tech Sys)

Condition:Used (Refurbished and warranty is available). Contact Us for more information.

S/N:05743

STS MultiplexInductively-Coupled Plasma (ICP) Advanced Silicon Etch (ASE) System which meets OEM SPEC.

Ø S/N:03843

Ø Configuration: ASE system, 4 inch

Ø Clamp-chuck

Ø Loadlock Capability:3,4,5,6,8 inch

Ø LEYBOLD 1000 turbo pumps

Ø Remote Gas control Gas Box with 4 gas line configuration

-SF6

-C4F8

-O2

-Ar

Ø Dry pumps models: QDP80 for process chamber

Ø Edwards 40 Vacuum Pump for loadlock

Ø Helium Back side cooling

Ø Generators : ENI ACG3 for Bias; ACG10 for Coils; VL400 Phase Shift Controller

Ø STS AC Box

Ø STS Purge Panel Assembly

Ø Chiller: Neslab CFT-75

Hitachi CD-SEM 8820

Hitachi S-8820 CD-SEM
SN 8343-06

•Currently Configured for 200mm Wafer Sizes
•MFG Date: Nov 1996

•
Cassette Interface:
o
(2) Asyst Integrated SMIF
•
System Software ver.: 9.15
•
Measurement Method: Cursor and Line Profile Measurement
•
Measuring Range: 0.1 to 10um (CD Value Guarantee Range 0.3 to 2.5 um)
•
Measuring Repeatability: +/-1% or 5 nm (3 sigma), whichever is greater
•
Throughput: 20 WPH in Continuous Measurement (5 Point Measurement)

Hitachi CD-SEM 8820

Maker:Hitachi

Model:S-8820

S/N:SN 8344-05

Condition:Used,AS IS,Where IS

Price:

Information for reference only.

Gasonics AE 2001 Plasma Etcher

Manufacturer:Gasonics Model: Gasonics AE 2001

Condition:Used (Refurbished and warranty is available). Contact Us for more information.

Wafer Size Capacity:3 to 6 inch

Gasonics is a Registered Trademark of Novellus Corp.Gasonics AE 2001 is a single wafer downstream isotropic etch system, designed to etch thin films such as poly silicon, silicon nitride and CVD oxides.Utilizing the proven Aura downstream microwave source and a dedicated reactor chamber, GaSonicsAE2001 offers high etch rates and no RF damage to the wafer. Featuring high reliability and flexibility in process parameter, GaSonics AE 2001 is the unparalleled tool of choice for multiple applications and high capital productivity. Gaonicsa AE2001 is an electro-mechanical production system used to etch materials such as nitride, oxide poly-silicon etc. from the surface of silicon or other substrate. Each wafer is processed individually by means a chemical reaction induced by a gas plasma.

STS (Surface Tech Sys) MultiplexInductively-Coupled Plasma (ICP) Advanced Silicon Etch (ASE) System

Manufacturer:STS (Surface Tech Sys)

Condition:Used (Refurbished and warranty is available). Contact Us for more information.

S/N: 03843

STS MultiplexInductively-Coupled Plasma (ICP) Advanced Silicon Etch (ASE) System which meets OEM SPEC.

Ø S/N:03843

Ø Configuration: ASE system, 4 inch

Ø Clamp-chuck

Ø Loadlock Capability:3,4,5,6,8 inch

Ø LEYBOLD 1000 turbo pumps

Ø Remote Gas control Gas Box with 4 gas line configuration

-SF6

-C4F8

-O2

-Ar

Ø Dry pumps models: QDP80 for process chamber

Ø Edwards 40 Vacuum Pump for loadlock

Ø Helium Back side cooling

Ø Generators : ENI ACG3 for Bias; ACG10 for Coils; VL400 Phase Shift Controller

Ø STS AC Box

Ø STS Purge Panel Assembly

Ø Chiller: Neslab CFT-75

Matrix Matrix 105/106/205

Model: Matrix 105/205/106

Maker:Matrix

Condition:Fully Refurbished and upgraded by Allwin21 Corp.

Lead Time:6-8weeks

Price:We will do our best to meet your budget.Please contact us by e-mail.

Warranty: 6 to 12 months non-consumable parts warranty.

Amount in stock: 10 sets

Electroglass EG 1034 wafer probe

Manufacturer:ELECTROGLAS

Condition:Fully Refurbished

Lead Time: in 2 weeks

Price:Contact Us

Amount in stock: 20 sets

Fully refurbished and upgraded Branson IPC 2000/3000/4000

Model:Branson IPC 2000/3000/4000 Plasma Asher Descum (Barrel System)

Maker:Branson

Condition:Fully Refurbished and upgraded by Allwin21 Corp.

Lead Time:2-4 weeks

Price:We will do our best to meet your budget.Please contact us by e-mail.

Warranty: 6 to 12 months non-consumable parts warranty.

Amount in stock: 10 sets

Gasonics L3510

Model:Gasonics L3510

Maker:Gasonics

Condition:Fully Refurbished and upgraded by Allwin21 Corp.

Lead Time:6-8weeks

Price:We will do our best to meet your budget.Please contact us by e-mail.

Warranty: 6 to 12 months non-consumable parts warranty.

Amount in stock: 6 sets

Gasonics Aura 1000

Model:Gasonics Aura 1000

Maker:Gasonics

Condition:Fully Refurbished and upgraded by Allwin21 Corp.

Lead Time:6-8weeks

Price:We will do our best to meet your budget.Please contact us by e-mail.

Warranty: 6 to 12 months non-consumable parts warranty.

Amount in stock: 6 sets

Gasoncis Aura 3010

Model:Gasonics Aura 3010

Maker:Gasonics

Condition:Fully Refurbished and upgraded by Allwin21 Corp.

Lead Time:6-8weeks

Price:We will do our best to meet your budget.Please contact us by e-mail.

Warranty: 6 to 12 months non-consumable parts warranty.

Amount in stock: 6 sets

Lam Rainbow 4620/4628

Model:Fully refurbished Lam Rainbow 4620/4628 Plasma Etcher/RIE

Maker:Lam Research

Condition:Fully Refurbished by Allwin21 Corp.

Lead Time:6-8weeks

Price:We will do our best to meet your budget.Please contact us by e-mail.

Warranty: 6 to 12 months non-consumable parts warranty.

Amount in stock: 4 sets

STS Multiplex ASE AOE ICP CLUSTER TOOL

STS Multiplex ASE AOE ICP CLUSTER TOOL, 6 inch configuration now. 2 to 8 inch capability. The system is at Santa Clara,CA,USA.We can sell it at AS IS or refurbished condition.